1
Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition
Autoren:
Klauser, W.; Bartenwerfer, M.; Elfert, P.; Krauskopf, E.; Fatikow, S.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
2
Nanostructures on CMOS-intelligent sensors and actuators by post processing
Autoren:
Goehlich, Andreas; Vogt, Holger
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
3
Nanotechnology meets temperature-sensitive devices
Autoren:
Freitag, J.; Winzer, A. T.; Käpplinger, I.; Vogel, K.; Dietrich, G.; Ortlepp, T.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
4
New Micro-Nano-Technologies and -Components for Complex Sensors using the Example of a Glucose Sensor
Autoren:
Freitag, Hans-Joachim; Winzer, Andreas; Boege, Ludwig
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
5
Post-CMOS integrated ALD 3D micro- and nanostructures and application for multi-electrode arrays
Autoren:
Jupe, A.; Figge, M.; Goehlich, A.; Vogt, H.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
6
Post-CMOS integration of miniaturized solar cells for energy harvesting of autonomous sensor nodes
Autoren:
Stuehlmeyer, Martin; Goehlich, Andreas; Figge, Martin; Vogt, Holger
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
7
Process flow for integration silicon grass with metallic nanostructures in surface micromachined systems
Autoren:
Mehner, Hannes; Mueller, Lutz; Biermann, Steffen; Haenschke, Frank; Hoffmann, Martin
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
8
Self-aligning integration technique for organic electronics
Autoren:
Meyers, Thorsten; Vidor, Fabio F.; Kaijage, Shubi F.; Hilleringmann, Ulrich
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
9
Sensors and calibration standards for precise hardness and topography measurements in micro- and nanotechnology
Autoren:
Brand, Uwe; Doering, Lutz; Gao, Sai; Ahbe, Thomas; Buetefisch, Sebastian; Li, Zhi; Felgner, Andre; Meess, Rudolf; Hiller, Karla; Peiner, Erwin; Frank, Thomas; Halle, Axel
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
10
Technologies for modular microsystems for the Internet of Things (IoT)
Autoren:
Hampicke, M.; Ostmann, A.; Manessis, D.; Wolf, J. M.; Lang, K.-D.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
11
Template based one-dimensional sensing nanostructures grown by atomic layer deposition
Autoren:
Schulz, N.; Riekeberg, S.; Trieu, H. K.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
12
Transfer of Nanocrystalline Diamond Films Grown by Chemical Vapor Deposition for Sensors and Other Applications
Autoren:
Behroudj, A.; Strehle, S.
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
13
Wafer- and membrane-based plasmonic sensor surfaces for ultrasensitive molecular spectroscopy
Autoren:
Huebner,Uwe; Mayerhoefer, Thomas G.; Knipper, Richard; Patze, Sophie; Cialla-May, Dana; Weber, Karina; Popp, Juergen
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
14
Wafer-level manufacturing and optimization of CNT-based field-effect transistors
Autoren:
Tittmann-Otto, Jana; Hartmann, Martin; Schulz, Stefan E.; Hermann, Sascha
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
15
Wetting behaviour of LTCC and glasses on nanostructured silicon surfaces during sintering
Autoren:
Gropp, Sebastian; Fischer, Michael; Mueller, Jens; Hoffmann, Martin
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
16
Wissensplattform zur Mikro-Nano-Integration: Das Unsichtbare sichtbar machen
Autoren:
Krömker, Heidi; Hoffmann, Martin
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop
17
ZnO nanorods-patterned piezoresistive Si cantilevers for humidity sensors
Autoren:
Xu, Jiushuai; Yang, Jingmei; Wu, Wenze; Hamdana, Gerry; Bertke, Maik; Wasisto, Hutomo Suryo; Peiner, Erwin
Konferenz:
Mikro-Nano-Integration - 6. GMM-Workshop