1
Evaluation of a low-temperature fabrication technology for silicon-ceramic composite substrates
Authors:
Mohr-Weidenfeller, Laura; Gropp, Sebastian; Azizy, Raschid; Mueller, Bjoern; Guenther-Mueller, Sarah; Bucklitsch, Paul; Mueller, Jens; Strehle, Steffen
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
2
Experimental Characterization Method for Passive Microvalves in Diaphragm Pumps for Medical Applications
Authors:
Gruenerbel, Lorenz; Leikam, Barbara; Schrag, Gabriele
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
3
Exploring the advantages of acoustic power transfer using 1-3 composite transducers
Authors:
Kar, Bibhu; Wallrabe, Ulrike
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
4
Extended concept for a MEMS and IMS based ion filter
Authors:
Graf, Alexander; Funke, Nils; Hild, Olaf R.
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
5
Fabrication and Characterization of Sensitive Piled Semiconductor Diodes as Mid-Infrared Pyro-Detectors
Authors:
Kovatsch, Christoph; Bartl, Ulf; Grille, Thomas; Fant, Andrea; Zangl, Hubert; Ostermann, T.; Aschauer, Elmar; Stocker, Gerd
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
6
Fabrication of a Low Profile Planar Transformer Using a Dual PCB Approach
Authors:
Fischer, Eike Christian; Bierwirth, Tim Nils; Dencker, Folke; Wurz, Marc Christopher
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
7
Fabrication of integrated poly-silicon wave guides for mid-infrared absorption spectroscopy using the evanescent field
Authors:
Stocker, Gerald; Consani, Cristina; Thakkar, Pooja; Tortschanoff, Andreas; Fleury, Clement; Puehringer, Gerald; Jannesari, Reyhaneh; Saeidi, Parviz; Grille, Thomas; Kovatsch, Christoph; Bartl, Ulf; Aschauer, Elmar; Jakoby, Bernhard
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
8
Feldexpositionskonformer induktiver 13,56 MHz-Energie-Harvester für tief implantierte medizinische Systeme
Authors:
Faragalla, Mohamed; Krautschneider, Wolfgang; Kuhl, Matthias
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
9
Femtosecond laser fabrication of a paper-based biosensor for measurement of Amitriptyline
Authors:
Builes Sanchez, Jaime Esteban; Conrad, Monika; Gauglitz, Guenter; Dietzel, Andreas
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
10
Fertigung und Charakterisierung eines drahtlosen Retina-Implantats auf flexiblen Substraten
Authors:
Knoll, Thorsten; Velten, Thomas; Stracke, Frank; Le Harzic, Ronan; Olsommer, Yves; Meiser, Ina; Jaeger, Tino; Rammensee, Michael; Kurz, Oliver; Klesy, Stephan; Januschowski, Kai; Schulz, Andre; Szurman, Peter
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
11
Fiber-based optrodes Light delivery for optogenetics
Authors:
Petrovic, Jelena; Lange, Fred; Hohlfeld, Dennis
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
12
Film transfer from thin films to metal surfaces using sol-gels, self-assembling monolayers and water glass
Authors:
Basten, Robin G.; Zawacka, Aleksandra M.; Bengsch, Sebastian; Prediger, Maren S. ; Wurz, Marc Christopher
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
13
Finite element simulations of the electrochemical double layer structure under microscopic probes of various geometries
Authors:
Kuemmerle, Maxim; Hoermann, Johannes L.; Greiner, Andreas
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
14
Flexible Ultra-Thin Chip-Film Patch for Integration of Electronic Components for Biomedical Applications
Authors:
Passlack, Ulrike; Simon, Nicolai; Bucher, Volker; Harendt, Christine; Burghartz, Joachim N.
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
15
GaN-based pressure sensor for harsh environments with on-chip temperature compensation
Authors:
Moser, Matthias; Scherjon, Cor; Pradhan, Mamta; Alomari, Mohammed; Burghartz, Joachim
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
16
GlaRA – Glasinterposer-Technologie zur Realisierung hochkompakter Elektroniksysteme für Hochfrequenzanwendungen (160 GHz)
Authors:
Kroehnert, Kevin; Woehrmann, Markus; Schiffer, Michael; Friedrich, Georg; Starukhin, Dzmitry; Schneider-Ramelow, Martin; Mayer, Winfried; Chaloun, Tobias; Galler, Thomas; Waldschmidt, Christian; Schulz-Ruhtenberg, Malte; Ambrosius, Norbert; Hansen, Ulli
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
17
Herstellung von TXRF-Kalibrierproben mittels Atomlagenabscheidung (ALD) und Fotolithografie
Authors:
Schulz, Norbert; Zolotaryov, Andriy; Trieu, Hoc Khiem
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
18
Heterosystem-integrated carbon nanotube sensors for on-ASIC condition monitoring
Authors:
Boettger, Simon; Dietz, Franz; Pankenin, Eric; Dahra, Nipun; Kaulfersch, Eberhard; Gromala, P.; Hermann, Sascha
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
19
High dynamic range digital assay enabled by dual volume centrifugal step emulsification
Authors:
Schulz, Martin; Ruediger, Julian; Landmann, Emelie; Bakheit, Mohammed; Frischmann, Sieghard; Rassler, Daniela; Homann, Ana R.; von Stetten, Felix; Zengerle, Roland; Paust, Nils
Conference:
MikroSystemTechnik Kongress 2021 - Kongress
20
High Refractive Index Integrated Photonics on Glass Substrates
Authors:
Lipka, Timo; Bosnjak, Bojan; Alhareeb, N.; Rennpferdt, Lukas; Vermeer, Matthias L.; Blick, Robert H.; Trieu, Hoc Khiem
Conference:
MikroSystemTechnik Kongress 2021 - Kongress