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1

Changes in the MEMS industry 2007 - 2012

Authors:
Wicht, Henning; Bouchaud, Jérémie
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

2

Closed Loop Controlled Liquid Dosing System

Authors:
Götz, Martin; Ashauer, Matthias; Storz, Matthias; Kleiser, Michael; Zengerle, Roland
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

3

COB vs. Flip Chip - A technology and cost comparison based on a real product

Authors:
Kloeser, Joachim
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

4

Complex Miniaturized Analysis System for Nuclear Magnetic Resonance Spectroscopy of Nanoliter Amounts of Biological Sample Material

Authors:
Leidich, S.; Riemer, T.; Braun, M.; Kurth, S.; Gessner, T.; Gessner, T.
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

5

Cost-Driven Design of Smart Micro Systems

Authors:
Niedermayer, Michael; Hefer, Jan; Reichl, Herbert; Guttowski, Stephan
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

6

Design and Implementation ot a Micro Structure Printer tor Rapid Prototyping ot Microimplantable Medical Devices

Authors:
Kraaijeveld, Leander; Schwarz, Markus
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

7

Development and Characterization of Platinum Thin Films for Gas Analysis Microsystem

Authors:
Dow, Ali Badar Alamin; Sklorz, Adam; Benecke, Wolfgang; Lang, Walter
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

8

Development of a piston type condenser microphone for reconfigurable acoustic arrays

Authors:
Calaza, Carlos
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

9

Efficient Wireless powering of single-chip systems

Authors:
Baldi, Antonio; Segura-Quijano, Fredy; García-Canton, Jesús; Sacristán, Jordi; Oses, Ma Teresa
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

10

Electromagnetic inertial microgenerators for vibrational energy scavenging: Implementation of a Si technology based modular process for optimised devices

Authors:
Fondevilla, Núria; Serre, Christophe; Martínez, Susanna; Pérez-Rodríguez, Alejandro; Morante, Joan Ramón; Martincic, Emile; Montserrat, Josep; Jaume Esteve
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

11

Electron beam machining of microsystem products

Authors:
Tanasie, Gheorghe; Böhm, Stefan; Bärtle, Jan; Löwer, Thorsten; Reiter, Andrea; Franzkowiak, Michael; Reinhart, Gunther
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

12

European Research in Micro-Nano-Technology and Systems: Opportunities in Framework Programe 7

Authors:
Albuquerque, Augusto de
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

13

Evaluation of a low cost piezorresistive material for high resolution tactile sensors

Authors:
Castellanos, Julián; Navas-González, Rafael; Ochoteco, Estíbalitz; Vidal-Verdú, Fernando
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

14

Fabrication and characterization of a passive silicon-based direct methanol fuel cell

Authors:
Sabate, N.; Esquivel, J. P.; Santander, J.; Torres, N.; Gràcia, I.; Ivanov, P.; Fonseca, L.; Figueras, E.; Cané, C.
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

15

Fabrication of a Low-Frequency Ultrasonic Transducer

Authors:
Jia, Chenping; Wiemer, Maik; Hiller, Karla; Otto, Thomas; Gessner, Thomas; Gessner, Thomas
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

16

Fabrication of nanomechanical sensors monolithically integrated on CMOS by full wafer nanostencil lithography

Authors:
Arcamone, Julien; Boogaart, Marc A F van den; Serra-Graells, Francesc; Fraxedas, Jordi; Brugger, Jürgen; Pérez-Murano, Francesc
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

17

From MEMS to Smart Systems Integration

Authors:
Finkbeiner, Stefan
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

18

From MST components to Smart System: example of IMU

Authors:
Bouchaud, Jérémie; Dixon, Richard
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

19

From the flexible / rigid-flexible circuit board solution to the mechatronic 3D unit

Authors:
Bäcker, Dirk
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components

20

Fully-Integrated wireless CMOS smart sensor

Authors:
Segura-Quijano, Fredy; Sacristán, Jordi; García-Canton, Jesús; Oses, Teresa; Baldi, Antonio
Conference:
Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components