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IEC 62047-4:2008

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS

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115.00 € 

IEC 62047-2:2006

Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials

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80.00 € 

IEC 62047-3:2006

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

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20.00 €