Integrated Silicon Antennae for Operation at 80 GHz

Conference: GeMIC 2008 - German Microwave Conference
03/10/2008 - 03/12/2008 at Hamburg-Harburg, Germany

Proceedings: GeMIC 2008

Pages: 4Language: englishTyp: PDF

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Morschbach, M.; Xu, H.; Spiessberger, S.; Kasper, E. (NN)

In this paper we present different types of antennae operating at 80 and 85 GHz. Layout procedure, fabrication technology and first measurement results of an integrated antennae on high resistivity (HR) silicon (Si) substrate will be shown. With the promising results of this research, we suggest fully integrated Si single chip radar using high resistivity substrates, a so-called SIMMWIC.