Establishing Uncertainties for On-Wafer S-Parameter Measurements

Conference: GeMIC 2008 - German Microwave Conference
03/10/2008 - 03/12/2008 at Hamburg-Harburg, Germany

Proceedings: GeMIC 2008

Pages: 3Language: englishTyp: PDF

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Leinhos, J.; Arz, U. (Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig Germany)
Leinhos, J. (Institut für Hochfrequenztechnik und Funksysteme, Appelstraße 9A, 30167 Hannover Germany)

Although on-wafer high-frequency measurements are nowadays commonly used, uncertainties for scatteringparameter measurements in planar transmission lines are still not yet established - a problem which has been long solved in coaxial lines and waveguides. We describe a GUM-compliant approach that is capable of providing a traceability path for on-wafer measurements up to 50 GHz using the TRL calibration algorithm.