Leinhos, J.; Arz, U. (Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig Germany)
Leinhos, J. (Institut für Hochfrequenztechnik und Funksysteme, Appelstraße 9A, 30167 Hannover Germany)
Although on-wafer high-frequency measurements are nowadays commonly used, uncertainties for scatteringparameter measurements in planar transmission lines are still not yet established - a problem which has been long solved in coaxial lines and waveguides. We describe a GUM-compliant approach that is capable of providing a traceability path for on-wafer measurements up to 50 GHz using the TRL calibration algorithm.