Microstructured energy harvesters for energy autonomous sensors
Conference: Energieautarke Sensorik - 5. GMM-Workshop: Mikrosensorik mit autarker Energieversorgung und drahtloser Signalübertragung
11/12/2008 - 11/13/2008 at Düsseldorf, Germany
Proceedings: Energieautarke Sensorik
Pages: 6Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Hohlfeld, D.; Kamel, T.; Altena, G.; Su, J.; Vullers, R.; Schaijk, R. van (Holst Centre / IMEC, High Tech Campus 31, 5656 AE Eindhoven, The Netherl)
This work presents microstructured energy harvesters for powering autonomous sensors. We focus on vibrational and thermal energy harvesting devices. Vibrational devices either employ piezoelectric or electrostatic effects for energy conversion. Operating frequencies cover the range from 100 to 1000 Hz. We present a wireless energy autonomous sensor system, which measures temperature and transmits the results every 15 seconds by radio. The module is solely powered by a vibrational energy harvester. The thermal harvester features thermopile structures with 6 µm height. Micromachined thermocouples are considered as a cost-effective breakthrough solution for energy harvesters working at low thermal gradients and weak heat flows, typical for e.g. human body and some types of machine-related heat generation. The thermoelectric generators will be used, in first an instantiation, for autonomous wireless sensor nodes in a Body Area Network.