Emhemmed, Adel S.; Elgaid, K. (Department of Electronics and Electrical Engineering, University of Glasgow, Glasgow, United Kingdom)
In this paper we propose a 3D micromachined 210GHz elevated bowtie dipole antenna fed by coplanar waveguide. The antenna is designed for MMICs applications at G-band (140GHz to 220GHz). The antenna topology effectively creates a low dielectric substrate and undesired substrate effects can be eliminated, since the antenna substrate is essentially air (the lowest possible dielectric constant) and can be used on most substrates to monolithically integrate. The proposed antenna is composed of coplanar waveguide (CPW) feed line, air-bridges, a feeding post, supporting posts, and a radiator. The elevated antenna is fed with a gold feeding post connected to a CPW line on top of SI-GaAs substrate. The antenna fabrication is based on a standard III-V MMIC airbridge technology. The measured bandwidth is about 8.6GHz (For return loss<10dB) from 204GHz to 212.6GHz.