Selective deposition of aligned carbon nanotubes for NEMS applications

Conference: Mikro-Nano-Integration - 1. GMM-Workshops
03/12/2009 - 03/13/2009 at Seeheim, Germany

Proceedings: Mikro-Nano-Integration

Pages: 6Language: englishTyp: PDF

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Bonitz, Jens; Hermann, Sascha; Loschek, Sergei; Schulz, Stefan E. (Center for Microtechnologies, Chemnitz University of Technology, Chemnitz, Germany)
Liu, Ping (Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, P.R. China)
Schulz, Stefan E. (Fraunhofer Research Institution for Electronic Nano Systems, Chemnitz, Germany)

In this work we demonstrate a scalable approach for aligned deposition of SWCNT arrays with the AC-dielectrophoresis technique at room temperature. For that purpose we developed a special experimental setup where removable microfluidic channels are applied to guarantee definite and reproducible deposition parameters. Dispersions with highly purified Arc-SWCNTs and sodium dodecylsulfate (SDS) as dispersing agent were prepared. Electrode structures with different geometrics were fabricated and deposition of CNTs under variation of dispersion- and AC-field-parameters was performed. Furthermore we emphasized on the removal of dispersing residuals after deposition. SEM studies showed very homogeneous, selective and aligned CNT deposition between the electrodes. I-V measurements verify good and reliable contacts with comparatively low resistances.