Sapphire on silicon assembly using a nanostructured compliant interface

Conference: Mikro-Nano-Integration - 1. GMM-Workshops
03/12/2009 - 03/13/2009 at Seeheim, Germany

Proceedings: Mikro-Nano-Integration

Pages: 4Language: englishTyp: PDF

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Stranz, A.; Sökmen, Ü.; Peiner, E.; Waag, A. (Technical University Braunschweig, Germany)

A low temperature joining technique is described to connect nanostructured silicon with sapphire thereby reducing the stress due to temperature. Fabrication concept of nanopillars in silicon by using ICP-Cryo-dry etching will be reported. The joining process will be shown as well as investigations of residual bending and bond quality. Joining of nanostructured silicon with silver plates at different temperatures will be presented.