Numerical Modeling of a Micrometer Scaled Actuator Considering Different Force Calculation Methods

Conference: ISTET 2009 - VXV International Symposium on Theoretical Engineering
06/22/2009 - 06/24/2009 at Lübeck, Germany

Proceedings: ISTET 2009

Pages: 5Language: englishTyp: PDF

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Preisner, Thomas; Mathis, Wolfgang (Leibniz Universität Hannover)
Bolzmacher, Christian; Bauer, Karin (EADS Innovation Works Germany)
Gerber, Andreas; Quandt, Eckhard (Christian-Albrechts-Universität zu Kiel)

A hybrid numerical model of a micro mechanical actuator, which consists of a µm scaled coil and a permanent magnet, is presented. Furthermore, a comparison between different force calculation methods is given, which are opposed to laboratory measurements. Depending on these results, the impact on the mechanical deformation of the elastomeric layers is numerically analyzed.