Heterogeneously Integrated SOI Compound Semiconductor Photonics
Conference: ECOC 2009 - 35th European Conference on Optical Communication
09/20/2009 - 09/24/2009 at Vienna, Austria
Proceedings: ECOC 2009
Pages: 3Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Thourhout, Dries Van; Roelkens, Gunther (Photonics Research Group, INTEC, Ghent University - IMEC, Belgium)
We present a review of recent progress in III-V on silicon heterogeneous integration technology. Both fabrication technology and devices are discussed.