Heterogeneously Integrated SOI Compound Semiconductor Photonics

Conference: ECOC 2009 - 35th European Conference on Optical Communication
09/20/2009 - 09/24/2009 at Vienna, Austria

Proceedings: ECOC 2009

Pages: 3Language: englishTyp: PDF

Personal VDE Members are entitled to a 10% discount on this title

Thourhout, Dries Van; Roelkens, Gunther (Photonics Research Group, INTEC, Ghent University - IMEC, Belgium)

We present a review of recent progress in III-V on silicon heterogeneous integration technology. Both fabrication technology and devices are discussed.