Robustness Validation for MEMS

Conference: MikroSystemTechnik - KONGRESS 2009
10/12/2009 - 10/14/2009 at Berlin, Germany

Proceedings: MikroSystemTechnik

Pages: 3Language: englishTyp: PDF

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Jäger, B.; Kanert, W. (Infineon Technologies AG, Am Campeon 1-12, 85579 Neubiberg)

Robustness Validation (RV) is a valuable failure-mechanism-driven approach to product reliability and qualification, which relates real application conditions to test conditions. However, the application of Robustness Validation as described in the RV handbook to MEMS meets with difficulties connected to the special characteristics of such devices. These difficulties are discussed in the paper.