Facilitating Innovation in Advanced Multimaterial Micro and Nanotechnologies
Conference: Mikro-Nano-Integration - 2. GMM-Workshops
03/03/2010 - 03/04/2010 at Erfurt, Germany
Pages: 3Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Obermaier, Georg (Karlsruhe Institute of Technology, Germany)
The transfer of new materials to existing micro and nanofabrication environments is accompanied by significant barriers when it comes to reliable structuring and characterizing these new materials at the micro and nanoscale. Therefore, it is of paramount relevance for industrial developers but also for academic researchers to have wide access to a set of state-of-the-art multimaterial micro and nanotechnologies. The present paper introduces a recently founded infrastructure centre, which operates world leading micro and nanotechnologies toolboxes and which provide open access to these capabilities for any users from industry and academia.