New generation of high resolution and low cost Thermopile Arrays for Infrared Imaging

Conference: Sensoren und Messsysteme 2010 - 15. ITG/GMA-Fachtagung
05/18/2010 - 05/19/2010 at Nürnberg

Proceedings: Sensoren und Messsysteme 2010

Pages: 3Language: englishTyp: PDF

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Forg, B.; Herrmann, F.; Leneke, W.; Schieferdecker, J.; Schulze, M.; Simon, M.; Storck, K. (Heimann Sensor GmbH, Grenzstr. 22, 01109 Dresden, Germany)
Völklein, F. (University of Applied Science Wiesbaden / IMTech, Rüsselsheim, Am Brückweg 26, 65428 Rüsselsheim, Germany)

After announcing the world first fully monolithic 8x8 and 16x16 Thermopile Arrays, which do not require vacuum sealing in 2008, Heimann Sensor developed new 32x31 thermopile arrays with even higher resolution. The sensor element technology for the 16x16 was further improved and allows frame rates of more than 20 Hz. Furthermore, a new sensor element technology was started, which allows even higher sensitivities. The following paper deals with simulation and test results of this unique array technology.