Self-actuated micro-cantilever array with piezoresistive readout for multi-parameter recognition

Conference: Sensoren und Messsysteme 2010 - 15. ITG/GMA-Fachtagung
05/18/2010 - 05/19/2010 at Nürnberg

Proceedings: Sensoren und Messsysteme 2010

Pages: 5Language: englishTyp: PDF

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Bitterlich, C.; Ivanov, T.; Sarov, Y.; Sarova, V.; Zöllner, J.-P.; Wenzel, U.; Rangelow, I. W. (TU Ilmenau, Fakultät für Elektrotechnik und Informationstechnik, Institut für Mikro- und Nanoelektronik, Fachgebiet Mikro- und nanoelektronische Systeme, Gustav-Kirchhoffstr. 1, 98693 Ilmenau, Germany)
Höche, M.; Hummel, W. (IL Metronic Sensortechnik GmbH, Mittelstraße 33, 98693 Ilmenau-Unterpörlitz, Germany)

The classical use of cantilever is Scanning Probe Microscopy for characterizing surface properties. Due to the need of most expansive or complex readout and actuation units, expansion to other industrial applications is limited. In contrast to usual applications we like to present a self-actuated cantilever with piezoresistive readout as multi-parameter sensor. The cantilever is thermally actuated with low power consumption and can be functionalized with chemical sensitive polymers, thin films or metal compounds. By applying a cantilever array with different functionalized cantilevers one can realize an "electronic nose" in a size of a matchbox at low cost. A reference cantilever can be added to a cantilever array for measuring pressure and temperature. In this manner a multi-parameter sensor can be realised. The shallow piezoresistors enable high sensitivity measurements detecting mass adsorption and recovery of the sensitive layer.