Hofer, M.; Nomvussi, S. A. K.; Rangelow, I. W. (FG Mikro- und nanoelektronische Systeme, Institut für Mikro- und Nanotechnologien, Postfach 100565, 98684 Ilmenau, Germany)
Stauden, Th.; Pezoldt, J. (FG Nanotechnologie, Institut für Mikro- und Nanotechnologien, Postfach 100565, 98684 Ilmenau, Germany)
Nanoelectromechanical systems (NEMS) have recently generated significant interest in sensing because of their ultrahigh operating frequencies, small size, very low operating power and high quality factors (Q). Nanomechanical resonators are widely used as nano-balances to detect small quantities of adsorbed molecules through shifts in oscillation frequency. Advances in lithography and materials have enabled the fabrication of nanoscale mechanical resonators, which have been operated as force, distance, and mass sensors. Here we demonstrate a SOI-based nanomechanical resonator which can be used as nano-balance with molecular mass resolution.