Parallel Cantilever Systems for Scanning and Analysis

Conference: Sensoren und Messsysteme 2010 - 15. ITG/GMA-Fachtagung
05/18/2010 - 05/19/2010 at Nürnberg

Proceedings: Sensoren und Messsysteme 2010

Pages: 5Language: englishTyp: PDF

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Frank, A.; Ivanov, Tz.; Sarov, Y.; Zöllner, J.-P.; Bischoff, G.; Rangelow, I. W. (Fakultät für Elektrotechnik und Informationstechnik, Institut für Mikro- und Nanoelektronik, Fachgebiet Mikro- und nanoelektronische Systeme, Gustav - Kirchhoff - Str. 1, 98693 Ilmenau)
Zawieruchac, P.; Zielony, M.; Gotszalk, T. (Wroclaw University of Technology, Faculty of Mikrosystems, Electronics and Photonics, 50-372 Wroclaw, Poland)
Nikolov, N. (Microsystems Ltd., P.O. Box 147, 9010 Varna, Bulgaria)

Scanning proximity probes are uniquely powerful tools for analysis, manipulation and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. Up to 256 self-sensing and self actuated proximal probes are discussed. Readout based on piezoresistive sensors and bending control based on bimorph DC/AC-actuations are described in detail.