Arch-type microcantilever as uncooled infrared detectors

Conference: Sensoren und Messsysteme 2010 - 15. ITG/GMA-Fachtagung
05/18/2010 - 05/19/2010 at Nürnberg

Proceedings: Sensoren und Messsysteme 2010

Pages: 4Language: englishTyp: PDF

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Steffanson, M.; Ivanov, T.; Shi, F.; Hartmann, H.; Rangelow, I. W. (FG Mikro- und nanoelektronische Systeme, Institut für Mikro- und Nanotechnologien, Postfach 100565, 98684 Ilmenau, Germany)

A novel arch-type microcantilever has been developed as an uncooled infrared (IR) detector. The patented design uses the bimorph effect for mechanical deflection when exposed to infrared radiation. The so called arch-type enables greater deflections at high resonance frequencies. Materials used for the bimorph are amorphous Si with SiNy and Al, for the IR absorption polymers and TiN. First results have shown a noise equivalent temperature difference (NETD) of <20mK with optical readout. Alternatively capacitance and piezoresistive readout can be used.