Novel concept for a Monolithically Integrated MEMS VCSEL

Conference: IPRM 2011 - 23th International Conference on Indium Phosphide and Related Materials
05/22/2011 - 05/26/2011 at Berlin, Germany

Proceedings: IPRM 2011

Pages: 4Language: englishTyp: PDF

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Gruendl, Tobias; Nagel, Robin D.; Geiger, Kathrin; Grasse, Christian; Hager, Thomas; Boehm, Gerhard; Meyer, Ralf; Amann, M.-C. (Technische Universitaet Muenchen, Am Coulombwall 4, 85748 Garching, Germany)
Debernardi, Pierluigi (IEIIT - CNR, Politecnico di Torino, Corso Duca degli Abruzzi 24, 10129 Torino, Italy)
Ortsiefer, Markus; Rosskopf, Jürgen (VERTILAS GmbH, Lichtenbergstrasse 8, 85748 Garching, Germany)

We present a novel concept of a fully Monolithically Integrated MEMS VCSEL structure, called MIMS VCSEL. Its both components, the laser active medium and the electro-thermally tuned membrane on top show excellent values. The combination of the developed high-power laser showing 6.7 mW at 20 °C and 3 mW at 80 °C, respectively, with a widely tunable, high speed membrane (minimum bending values of 1.8 µm and tuning frequencies within 3-14 kHz) are perfect starting conditions for VCSEL devices with an aimed tuning range beyond 100 nm.