Structural evaluation of InGaAs/GaAsP multiple quantum wells via in-situ wafer’s curvature measurement and ex-situ X-ray diffraction

Conference: IPRM 2011 - 23th International Conference on Indium Phosphide and Related Materials
05/22/2011 - 05/26/2011 at Berlin, Germany

Proceedings: IPRM 2011

Pages: 4Language: englishTyp: PDF

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Sodabanlu, H.; Watanabe, K.; Nakano, Y. (Research Center for Advance Science and Technology, The University of Tokyo, Japan)
Ma, S. J.; Sugiyama, M.; Nakano, Y. (School of Engineering, The University of Tokyo, Japan)

We have developed the calculation technique using wafer’s curvature and X-ray diffraction (XRD) pattern to analyze the structure of InGaAs/GaAsP multiple quantum wells (MQWs) grown by metalorganic vapor phase epitaxy (MOVPE). Instead of using difficult and time consuming XRD reciprocal space mapping (RSM), the curvature can effectively supplement the uncertain information of MQWs obtained from XRD 2theta-ω scan. We have proposed an alternative method to determine the physical parameters of MQWs structure