Biosensor System with Polymer Microring Resonators Manufactured by Multilevel-Nanoimprint
Conference: MikroSystemTechnik - KONGRESS 2011
10/10/2011 - 10/12/2011 at Darmstadt, Deutschland
Pages: 4Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Landgraf, Rene; Kirchner, Robert; Finn, Andreas; Haugwitz, Toni; Deicke, Frank; Fischer, Wolf-Joachim (Fraunhofer Institute for Photonic Microsystems, Dresden, Germany)
Landgraf, Rene; Kirchner, Robert; Finn, Andreas; Haugwitz, Toni; Arndt, Susann; Fischer, Wolf-Joachim (Technische Universität Dresden, Institute of Semiconductors and Microsystems, Dresden, Germany)
Optical biosensors based on microring resonators gained great interest due to their high sensitivity and ability for sensing of multiple analytes. If the sensor is intended for point-of-care-diagnostics (POCT, point-of-care-testing), a standalone and portable sensor system needs to be built up. The here introduced biosensor system uses chemically functional polymer microring resonators that are manufactured by UV-based nanoimprinting (UV-NIL). By using hybrid nanoimprint molds, the NIL-inherent polymer residual layer could be fully prevented. The biosensor system proposes misalignment tolerant and out-of-plane fiber-to-chip coupling by grating couplers that are manufactured by multilevel-nanoimprint with a 3D imprint mold. The presented NIL technologies have a high potential for the mass production of low-cost and single use biosensors. By integrating a miniaturized fluidic system, the automation of entire biosensing experiments becomes possible. The presented optical biosensor system has a high potential for POCT with single use low-cost biosensor chips as desired in medical diagnostics.