Performance Modeling and Characterization of AlN Resonator

Conference: MikroSystemTechnik - KONGRESS 2011
10/10/2011 - 10/12/2011 at Darmstadt, Deutschland

Proceedings: MikroSystemTechnik

Pages: 4Language: englishTyp: PDF

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Qiu, H. C.; Schwarz, P.; Feili, D.; Seidel, H. (Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, 66123 Saarbrücken, Germany)
Qiu, H. C.; Wu, X. Z. (National University of Defense Technology, College of Mechanical Engineering and Automation, 410073 Hunan Province, China)

This paper reports on the electrical performance modeling and analysis of one and two port AlN piezoelectric resonator that can be employed in pressure and gas viscosity measurements. We derived an equivalent circuit model which analyzes all the motional and parasitic elements using lumped electrical components, the circuit model simulation predictions were found to match well with experimental resonator responses. Furthermore, we found that the experiment setup has a big effect on the results. The results obtained from the simulation and measurement can be used for optimizing the resonator design and the measurement setup.