Combined Simulation of a Micro Permanent Magnetic Linear Contactless Displacement Sensor

Conference: MikroSystemTechnik - KONGRESS 2011
10/10/2011 - 10/12/2011 at Darmstadt, Deutschland

Proceedings: MikroSystemTechnik

Pages: 4Language: englishTyp: PDF

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Gao, J.; Weiland, T. (Graduate School of Computational Engineering, Dolivostraße 15, 64293 Darmstadt, Germany)
Gao, J.; Müller, W. F. O.; Weiland, T. (Institut für Theorie Elektromagnetischer Felder (TEMF), Schloßgartenstraße 8, 64289 Darmstadt, Germany)
Greiner, F.; Eicher, D.; Schlaak, H. F. (Institut für Elektromechanische Konstruktionen (EMK), Merckstraße 25, 64283 Darmstadt, Germany)

This permanent magnetic linear contactless displacement sensor is a new type of displacement sensor operating on the magnetic inductive principle and abbreviated as PLCD sensor. It has many excellent properties and has already been used for many applications. In this article a Micro-PLCD sensor which can be used for large scale, absolute displacement measurement in the micro electromechanical system (MEMS) was designed and simulated with commercial software package CST EM STUDIO(r) including building a virtual model, magnetostatic calculation, low frequency calculation, steady current calculation and thermal calculation.