Design Flow for a 3D Integrated Silicon System
Conference: ANALOG '11 - 12. GMM/ITG-Fachtagung
11/07/2011 - 11/09/2011 at Erlangen, Deutschland
Proceedings: ANALOG '11
Pages: 2Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Mörth, Thomas; Minixhofer, Rainer; Wild, Andreas (austriamicrosystems AG, Austria)
This paper describes a design flow to create 3D integrated sensor systems on standard CMOS processes using existing CAD software. The main problem to overcome is the inability of current software to handle two different dies in a 3D stack.