Magnetic Levitating System with 6 DOF
Conference: Innovative Small Drives and Micro-Motor Systems - 9. GMM/ETG-Fachtagung
09/19/2013 - 09/20/2013 at Nürnberg, Deutschland
Proceedings: Innovative Small Drives and Micro-Motor Systems
Pages: 4Language: englishTyp: PDF
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Authors:
Schaeffel, Christoph; Katzschmann, Michael; Mohr, Hans-Ulrich (IMMS, Institut fuer Mikroelektronik- und Mechatronik-Systeme gemeinnuetzige GmbH, Ehrenbergstr. 27, 98693 Ilmenau, Germany)
Gloess, Rainer; Rudolf, Christian; Mock, Christopher; Walenda, Carolin (Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany)
Abstract:
The paper describes the structure and a set of model based design steps of a novel 6 DOF planar magnetic drive system with nanometer positioning accuracy. The movable platform of the system is free of any wiring connection and the upper surface is freely accessible.