Dynamic analysis of the torsional resonant mode of piezoelectric microcantilevers
Conference: Mikrosystemtechnik 2013 - Von Bauelementen zu Systemen
10/14/2013 - 10/16/2013 at Aachen, Deutschland
Proceedings: Mikrosystemtechnik 2013
Pages: 4Language: englishTyp: PDF
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Authors:
Qiu, H. C. (Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, 66123 Saarbrücken, Germany )
Feili, D.; Seidel, H. (Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, 66123 Saarbrücken, Germany)
Wu, X. Z. (National University of Defense Technology, College of Mechanical Engineering and Automation, 410073 Hunan Province, China)
Abstract:
This paper systematically investigates the performance of the microcantilever in different resonance models, which are the first and second flexural modes, the first lateral mode and the first torsional mode, respectively. An aluminum nitride based piezoelectric cantilever was fabricated and tested in a vacuum chamber, under controlled pressure from ultra high vacuum to normal atmosphere. A specially designed circuit has been developed to compensate the electrical crosstalk in the cantilever, and to amplify the resonance signal. The measurement results showed that, the torsional mode exhibit better quality factors than that of the flexural and lateral ones. Finally, an analytical model has been derived to investigate the air damping effect of the resonator in torsional mode.