Planar, double-layer magnetic inductors for low power, high frequency DC-DC converters

Conference: CIPS 2014 - 8th International Conference on Integrated Power Electronics Systems
02/25/2014 - 02/27/2014 at Nuremberg, Germany

Proceedings: ETG-Fb. 141: CIPS 2014

Pages: 5Language: englishTyp: PDF

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Haddad, Elias; Martin, Christian; Joubert, Charles (University Lyon 1, Ampere Lab, CNRS, UMR 5005, Lyon, F-69622, France)
Allard, Bruno; Buttay, Cyril; Tannous, Tony Abi; Bevilacqua, Pascal (INSA Lyon, Ampere-Lab, CNRS, UMR 5005, Villeurbanne F-69621, France)

This paper presents the design and fabrication of micro-planar inductors with magnetic layers, as well as the corresponding experimental results. These spiral inductors are suitable for low power (1W) DC-DC monolithic converters. Sufficiently high switching frequency (>100MHz) enables a System-In-Package assembly with the micro-planar inductors underneath the active chip. Thick magnetic layers serve as a mechanical carrier and also present a double purpose of increasing the inductance value and suppressing electromagnetic interferences (EMI). Geometrical parameters are studied using an electromagnetic simulator for optimization purposes. A 500 nH spiral inductor with expected 140 mO RDC, 9 mm2 footprint area is designed for operating at 100 MHz. A lab-scale technology has been developed. Samples are tested using a LCR meter in the 10 kHz to 100 MHz frequency range. The performances of the micro-inductors are compared to the predicted response of simulated equivalent model with good agreement.