Flexible Flow Sensors – Packaging and Applications
Conference: Sensoren und Messsysteme 2014 - Beiträge der 17. ITG/GMA-Fachtagung
06/03/2014 - 06/04/2014 at Nürnberg, Deutschland
Proceedings: Sensoren und Messsysteme 2014
Pages: 5Language: englishTyp: PDF
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Authors:
Dumstorff, Gerrit; Berganski, Robert; Brauns, Eike; Sturm, Hannes; Lang, Walter (Institute of Microsensors, -actuators, and -systems (IMSAS), Microsystems Center Bremen (MCB), University of Bremen, Bremen, Germany)
Abstract:
The following paper introduces athermal flow sensor based on a flexible substrate. Therefore, the commonly used 380 µm silicon substrate has been replaced by an 18 µm polyimide foil to obtain higher flexibility and adaptability for integration on nonplanar surfaces. To show the applicability of the developed concept, the flexible flowsensor has been integrated on an airfoil with the aim of a flow separation and reattachment detection.In an additional application, the flow sensor has beenattachedon the curved surface of a pipe to measure the flow rate inside.