Template-assisted fabrication of self-supported 3D functional nanostructure arrays towards high performance devices

Conference: Mikro-Nano-Integration - Beiträge des 5. GMM-Workshops
10/08/2014 - 10/09/2014 at Ilmenau, Deutschland

Proceedings: Mikro-Nano-Integration

Pages: 4Language: englishTyp: PDF

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Grote, Fabian; Wen, Liaoyong; Lei, Yong (Ilmenau University of Technology, Institute of Physics & IMN MacroNano® (ZIK), MacroNano® (ZIK), Prof.-Schmidt-Str. 26, 98693 Ilmenau, Germany)

Large scale arrays of self-supported 3D functional nanostructures, including nanowire and nanotube arrays, on substrates have attracted considerable amount of interest due to the unique physical properties and many potential applications in areas such as energy storage and energy conversion, electronics, sensing, and biomedicine. In particular nano-porous anodic aluminum (AAO) oxide templates are ideal candidates to fabricate the desired functional nano-arrays due to the remarkable properties, including structural control in the nanometer regime (i.e., pores size and length), large area patterning, low cost, easy scalability, and good process ability. Here, we will introduce conventional AAO templates with shot range order and AAO templates that were synthesized by an innovative nano-imprint approach and hence exhibit long range order. The fabrication process of nanowire and nanotube arrays in these templates will be introduced on different material systems, using an electrochemical deposition approach and atomic layer deposition.