UV-imprinting for the integration of inkjet-printed micro-optical elements

Conference: Mikro-Nano-Integration - Beiträge des 5. GMM-Workshops
10/08/2014 - 10/09/2014 at Ilmenau, Deutschland

Proceedings: Mikro-Nano-Integration

Pages: 3Language: englishTyp: PDF

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Jacot-Descombes, Loic; Schleunitz, Arne; Klein, Jan J.; Grützner, Susanne; Bullerjahn, Franziska (micro resist technology GmbH, 12555 Berlin, Germany)

The possibility to employ tailored polymer materials into various micro- and nanofabrication technologies is an essential benefit for the manufacture of MOEMS and/or optical sensors. In case of microlenses, the optical efficiency can be optimized by reducing the backscattering reflection due to index matching materials. With focus on a technology convergence, this paper presents the replication of confinement pedestals, based on nanoimprint lithography approaches, which leads to a new way for the precisely-localized integration by inkjet printing of convex microlenses. The innovative method allows well-controlled microlens shape – directly linked to their focal length – and alignment within the array. The work is based on the compatibility of an UV curable hybrid polymer, i.e. OrmoComp(r), with UV-based nanoimprint lithography processes and inkjet printing. Examples demonstrate the gain of system integration by combining UV-based nanoimprint lithography and inkjet printing with tailored polymer materials for optical and sensor applications. The results presented herein can also be reproduced with nanoparticle doped inks increasing for example magnetic actuation of the final structures.