Micro enables Nano – Active Cantilever for Single Digit Nanofabrication

Conference: Mikro-Nano-Integration - Beiträge des 5. GMM-Workshops
10/08/2014 - 10/09/2014 at Ilmenau, Deutschland

Proceedings: Mikro-Nano-Integration

Pages: 6Language: englishTyp: PDF

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Kaestner, Marcus; Ivanov, Tzvetan; Krivoshapkina, Yana; Ahmad, Ahmad; Angelov, Tihomir; Lipowicz, Hubert; Budden, Matthias; Lenk, Steve; Aydogan, Cemal; Atanasov, Ivaylo; Guliyev, Elshad; Szostak, Katarzyna; Ishchuk, Valentyn; Schuh, Andreas; Zoellner, Jens-Peter; Rangelow, Ivo W. (Department of Micro- and Nanoelectronic Systems, Institute of Micro- and Nanoelectronics, Faculty of Electrical Engineering and Information Technology, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 1, 98693 Ilmenau, Germany)
Reum, Alexander; Hofer, Manuel; Holz, Mathias; Schuh, Andreas (nano analytik GmbH, Ehrenbergstraße 11, 98693 Ilmenau, Germany)

A successful ‘beyond CMOS’ information-processing paradigm most likely will require a new lithographic technology able to generate, overlay, and inspect features in single digit nanometer regime. In order to address this problem, we have been working on novel scanning probe lithography methods, wherein self-actuating, self-sensing (active) cantilever technology is applied. Herein, we present a scanning probe lithography based on cantilever with integrated thermally actuated bimorph actuator, piezoresistive read-out and conductive tip. In summary, we show how these integrated microsystems can be applied for manufacturing of future nanosystems – in short term: “micro enables nano”.