A monolithic integrated MEMS in a 350 nm technology for filter monitoring applications
Conference: ANALOG 2014 – Analogschaltungen im Systemkontext - Beiträge der 14. GMM/ITG-Fachtagung
09/17/2014 - 09/19/2014 at Hannover, Deutschland
Proceedings: ANALOG 2014 – Analogschaltungen im Systemkontext
Pages: 5Language: englishTyp: PDF
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Authors:
Metschnabl, Andreas; Neubert, Marco; Heinz, Steffen; Erler, Klaus (EDC Electronic Design Chemnitz GmbH, Germany)
Heinz, Steffen; Erler, Klaus; Horstmann, John T. (Chemnitz University of Technology, Germany)
Abstract:
This paper presents a system which combines a modern 350 nm mixed-signal CMOS technology with a MEMS technology for monitoring of the filter contamination level of suction and filtering systems. Therefore the system includes a piezoresistive pressure sensor, a controller core, a power management, a digital and analog signal processing with a variable gain up to 270 and an 8 bit autonomous offset adjust as well as an RFID interface to allow wireless transfer of energy and data.