A Novel High–Precision Magnetic Levitation System

Conference: IKMT 2015 - 10. ETG/GMM-Fachtagung Innovative Klein- und Mikroantriebstechnik
09/14/2015 - 09/15/2015 at Köln, Deutschland

Proceedings: ETG-Fb. 146: IKMT 2015

Pages: 5Language: englishTyp: PDF

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Lahdo, Mousa; Kovalev, Sergej (Department of Informatics, Electrical Engineering and Mechatronics, University of Applied Sciences Mittelhessen, Friedberg, Germany)

In many modern applications, such as the semiconductor manufacturing or biotechnology, multi-coordinate positioning systems are applied, which are characterized by high precision and dynamic. By using magnetic guidance in this positioning system, position accuracies in the nm-range are possible as well as application in clean-room and vacuum environment. This paper presents a novel magnetic levitation system with six degrees of freedom, which is characterized by a very simple compact construction with a relatively low-power consumption of the magnetic guidance. The proposed novel design of the air-core coils allows the implementation of simplified control algorithm as well as a low weight mover. The first results from the control of the magnetic guidance with stationary positioning are presented.