Ge Waveguide Photodetector on Wafer-bonded Ge-on-Insulator Substrate Monolithically Integrated with Amorphous Si Waveguide

Conference: ECOC 2016 - 42nd European Conference on Optical Communication
09/18/2016 - 09/22/2016 at Düsseldorf, Deutschland

Proceedings: ECOC 2016

Pages: 3Language: englishTyp: PDF

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Kang, Jian; Takenaka, Mitsuru; Takagi, Shinichi (Department of Electrical Engineering and Information Systems, The University of Tokyo, Tokyo, Japan & JST-CREST)

We demonstrate the proof-of-concept of Ge/a-Si hybrid photonic integrated circuits on Ge-on-insulator (GeOI) substrate fabricated by wafer bonding. We successfully demonstrate waveguide Ge PIN photodetector with low-dark-current operation on GeOI wafer monolithically integrated with a-Si passive waveguide.