Ge Waveguide Photodetector on Wafer-bonded Ge-on-Insulator Substrate Monolithically Integrated with Amorphous Si Waveguide
Conference: ECOC 2016 - 42nd European Conference on Optical Communication
09/18/2016 - 09/22/2016 at Düsseldorf, Deutschland
Proceedings: ECOC 2016
Pages: 3Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Kang, Jian; Takenaka, Mitsuru; Takagi, Shinichi (Department of Electrical Engineering and Information Systems, The University of Tokyo, Tokyo, Japan & JST-CREST)
We demonstrate the proof-of-concept of Ge/a-Si hybrid photonic integrated circuits on Ge-on-insulator (GeOI) substrate fabricated by wafer bonding. We successfully demonstrate waveguide Ge PIN photodetector with low-dark-current operation on GeOI wafer monolithically integrated with a-Si passive waveguide.