Ultra-efficient Interleaved Depletion Modulators by Using Advanced Fabrication Technology

Conference: ECOC 2016 - 42nd European Conference on Optical Communication
09/18/2016 - 09/22/2016 at Düsseldorf, Deutschland

Proceedings: ECOC 2016

Pages: 3Language: englishTyp: PDF

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Giesecke, Anna Lena; Prinzen, Andreas; Fueser, Heiko; Porschatis, Caroline; Lerch, Holger; Bolten, Jens; Suckow, Stephan; Chmielak, Bartos; Wahlbrink, Thorsten (AMO GmbH, AMICA, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany)

We fabricated highly efficient silicon photonic depletion modulators utilizing interdigitated pn-junctions with critical dimensions <200 nm. With this concept, record low values <2 VdB of (VpiLalpha)2V as key figure of merit for the efficiency of such modulators have been achieved.