The Numerical Investigation of the Effect of Withdrawing Velocity on Marangoni Drying Performance in the Post CMP Cleaning

Abstract:
Marangoni drying is an advanced technique to obtain ultra-clean surface in ULSI devices manufacturing. Marangoni force along the tangential direction of meniscus that produced by surface tension gradient realizes the reduction of entrainment film thickness. In this study, a model of Marangoni drying was built, in which, the surfactant transport were neglected and variable particular withdrawing velocity were prescribed. Further, the numerical simulation was employed using finite element method. Results reveal that the tangential flow along the meniscus in the flow field is remarkable and the entrainment film thickness increases monotonically with the increase of withdrawing velocity. This gives rise to the gain of the inertial force and more liquid is dragged into the film region and thus, the film thickness is increased. Keywords: Post-cleaning, Marangoni Drying, Numerical Investigation, Withdrawing Velocity, Residual Film Thickness, Flow Field