BiCMOS Embedded RF-MEMS Technologies
Conference: MikroSystemTechnik 2017 - Kongress
10/23/2017 - 10/25/2017 at München, Deutschland
Proceedings: MikroSystemTechnik 2017
Pages: 3Language: englishTyp: PDF
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Authors:
Tolunay Wipf, Selin; Göritz, Alexander; Wietstruck, Matthias; Wipf, Christian (IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany)
Kaynak, Mehmet (IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany & Sabanci University, Orta Mahalle, Tuzla 34956 Istanbul, Turkey)
Abstract:
This paper presents BiCMOS embedded RF-MEMS switch technologies for two technology lines, the 0.25 µm and the 0.13 µm SiGe BiCMOS. The developed RF-MEMS switch technologies include Single-Pole Single-Throw (SPST) and Single-Pole Double-Throw (SPDT) switches for mm-wave applications. The technologies offer two different packaging technologies for the RF-MEMS switches, namely Silicon cap packaging and thin film wafer-level encapsulation.