Low fluidic resistance valves utilizing buckling actuators
Conference: MikroSystemTechnik 2017 - Kongress
10/23/2017 - 10/25/2017 at München, Deutschland
Proceedings: MikroSystemTechnik 2017
Pages: 4Language: englishTyp: PDF
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Authors:
Shabanian, Ardavan; Goldschmidtboeing, Frank; Dhananjaya, Chiranjeevi; Bettaswamy Gowda, Hitesh; Baeumker, Eiko; Woias, Peter (Laboratory for Design of Microsystems, IMTEK - Department of Microsystems Engineering, University of Freiburg, Georges-Köhler-Allee 102, 79110 Freiburg, Germany)
Abstract:
We present a low cost device for fluid handling which utilizes our high stroke buckling piezo-membrane actuator and is a high performance microvalve and micropump simultaneously. Previously we have reported on the novel reciprocating pumping concept of the device which results in 25 ml/min of flowrate at only 20 Hz actuation frequency which demonstrates much higher power efficiency than comparable reported micropumps in the literature. Here we further reduced the size of the device using a smaller actuator, and demonstrate the valving functionality of the device under 100 kPa of pressure and its high flow factor of 3.72 ml/min at only 1 kPa of driving pressure. The fluidic resistance of the valve is also modelled in 2D and 3D finite-element simulations.