Vertical Nanoslit Arrays for Separating Molecules by Size and Charge
Conference: MikroSystemTechnik 2017 - Kongress
10/23/2017 - 10/25/2017 at München, Deutschland
Proceedings: MikroSystemTechnik 2017
Pages: 3Language: englishTyp: PDF
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Authors:
Bassu, Margherita; Burg, Thomas P. (Biological Micro- and Nanotechnology, Max Planck Institute for Biophysical Chemistry, Göttingen, Germany)
Holik, Peter; Schmitz, Sam; Steltenkamp, Siegfried (Micro System Technology (MST), Centre of Advanced European Studies and Research, Bonn, Germany)
Abstract:
In this work we present a new class of nanofluidic devices - vertical nanoslit arrays - providing the reproducibility and the geometrical precision of planar devices and the scalability and throughput of membrane technology. We describe the process technology in detail, and discuss associated opportunities and limitations.