3D micro-machined inductive suspensions with the lowest energy consumption
Conference: MikroSystemTechnik 2017 - Kongress
10/23/2017 - 10/25/2017 at München, Deutschland
Proceedings: MikroSystemTechnik 2017
Pages: 3Language: englishTyp: PDF
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Authors:
Poletkin, Kirill; Korvink, Jan Gerrit; Badilita, Vlad (Institute of Microstructure Technology, Karlsruhe Institute of Technology, 76344 Eggenstein-Leopoldshafen, Deutschland)
Lu, Z.; Wallrabe, Ulrike (Laboratory for Microactuators, Department of Microsystems Engineering – IMTEK, University of Freiburg, 79110, Freiburg, Deutschland)
Moazenzadeh, Ali (Voxalytic GmbH, 76228 Karlsruhe, Deutschland)
Abstract:
We report herewith a 3D micro-machined inductive contactless suspension, in which the power consumption due to the resistance of the coils (Pc = Ri2) is dramatically decreased by employing a polymer magnetic composite (PMC) core with high resistivity and high permeability. Two designs of suspensions with PMC core were experimentally studied. The results show a decrease of current in coils by a factor of 1.7 (60 mA versus 110 mA) compared to the suspension without core. This fact leads to a reduction in the operating temperature of the suspension to 58 °C for levitation height of 110 µm (ambient air was 28 °C), which is the lowest value among all previously reported micromachined inductive suspensions. The present achievement demonstrates the feasibility and at the same time the opportunity that three-dimensional micromachined inductive suspension technology becomes an integrated element of levitating micro-systems.