Motion analyzer for characterization of micro actuators with movements in 3 degrees of freedom
Conference: MikroSystemTechnik 2017 - Kongress
10/23/2017 - 10/25/2017 at München, Deutschland
Proceedings: MikroSystemTechnik 2017
Pages: 4Language: englishTyp: PDF
Personal VDE Members are entitled to a 10% discount on this title
Authors:
Nakic, Christian; Schlaak, Helmut F. (Institute of Electromechanical Design, Technische Universität Darmstadt, Germany)
Abstract:
This work presents a novel measurement device for the deflection and temperature distribution of polymer electrothermal actuators. Combining a CCD camera with optical pattern matching and a laser triangulation measurement system the motion analyzer enables the characterization of movements in three degrees of freedom in a measurement range of 4.5 mm x 4.5 mm x 4 mm. Occurring optical errors, measurement accuracies and dynamic limits of the motion analyzer are determined.