CMOS Integrated Field Coils for Self-Calibration of 3D Hall-Sensors
Conference: Sensoren und Messsysteme - 19. ITG/GMA-Fachtagung
06/26/2018 - 06/27/2018 at Nürnberg, Deutschland
Proceedings: Sensoren und Messsysteme
Pages: 4Language: englishTyp: PDF
Personal VDE Members are entitled to a 10% discount on this title
Authors:
Krause, Dennis; Stahl-Offergeld, Markus; Hohe, Hans-Peter (Fraunhofer Institute for Integrated Circuits IIS, Erlangen, Germany)
Sand, Markus (Ingenieurbüro Sand, Tännesberg, Germany)
Kovacs, Guenter (Aschaffenburg University of Applied Sciences, Aschaffenburg, Germany)
Abstract:
An integrated arrangement of field coils for on-chip self-calibration is presented. Routine tests for 3D Hall sensors are very complex and need special test hardware to generate a well-defined three-dimensional magnetic field. In combination with a high voltage current source, the integrated arrangement allows the generation of local magnetic fields up to 2 mT. In spite of process variations, the error of each coil’s magnetic flux density is less than 1%. Magnetic tests can be done on-chip without need for additional external test equipment. Additionally, a low power mode allows for validity checks and online calibrations during measurements with a small magnetic flux density of 0:2 mT.