Rapid Micro-Nano-Integration of Single Silicon Nanowires in 2D-Sensor Arrays using Automated Software Tools

Conference: Mikro-Nano-Integration - 7. GMM-Workshop
10/22/2018 - 10/23/2018 at Dortmund, Deutschland

Proceedings: GMM-Fb. 92: Mikro-Nano-Integration

Pages: 5Language: englishTyp: PDF

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Roos, Michael M.; Huffert, Thomas; Puchinger, Anouk; Strehle, Steffen (Universität Ulm, Institut für Elektronische Bauelemente und Schaltungen, Ulm, Germany)

Nanosensors based on single silicon nanowire field-effect-transistors (FETs) represent a promising approach for biomedical and biochemical research and diagnosis. However, integration in particular of bottom-up-grown silicon nanowires is a major challenge as existing integration processes are not sufficiently deterministic in terms of 2D-positioning on a device substrate. In order to overcome this, we have developed a rapid micro-nano-integration process that is intended to integrate silicon nanowires, yet can also be applied to integrate other functional micro- and nanostructures of different material and geometry. Using well-suited automated software tools and combining them with laser lithography, we created an efficient manufacturing pathway starting from nanowire deposition and registration on the perspective device via automated read-in as well as software-assisted CAD-sensor design and spanning to precise integration via laser lithography. This enables us to integrate single-nanowires efficiently regardless of their substrate location. The high versatility of this approach allows assembling both, planar lab-on-a-chip devices and lab-on-a-tip-designs and provides an outlook on how bottom-up-grown nanowires could be micro-nano-integrated with view towards industrial scale batch processes. The used software tools are going to be available free of charge under a creative commons license on request.