Combining top-down bottom-up lithographic and galvanic manufacturing techniques for the generation of dynamic and reversible surfaces

Conference: Mikro-Nano-Integration - 7. GMM-Workshop
10/22/2018 - 10/23/2018 at Dortmund, Deutschland

Proceedings: GMM-Fb. 92: Mikro-Nano-Integration

Pages: 4Language: englishTyp: PDF

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Authors:
Kehagias, N.; Francone, A. (Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, Spain)
Lamprakou, Z. (National Technical University of Athens, Athens, Greece)
Guttmann, M.; Winkler, F.; Chamakos, N. T.; Papathanasiou, A. G. (Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology, Eggenstein-Leopoldshafen, Germany)
Fernandez, A. (Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, Spain & Iberian National Laboratory (INL), Braga, Portugal)
Sotomayor Torres, C. M. (Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, Spain & ICREA, Institució Catalana de Recerca i Estudis Avançats, Barcelona, Spain)

Abstract:
This contribution present a novel combined micro and nanofabrication approach to generate and replicate 3D free form micro and nano structures over large areas with high repetition rates. It is based on several lithography methods in combination with nickel electroforming. First mushroom-like nickel structures with different size were realized by controlled up- and overplating in hole arrays made by UV lithography. Thereafter direct replication of such 3D microstructures in commercially available hybrid resist (using nanoimprint lithography) leads to surfaces with a dynamic behaviour towards water and oils, thus demonstrating exceptional functionality.