Piezoelectric MEMS Sensors for the Detection of Weak Magnetic Signals with Adjustable Resonance
Conference: MikroSystemTechnik 2019 - Kongress
10/28/2019 - 10/30/2019 at Berlin, Deutschland
Proceedings: MikroSystemTechnik Kongress 2019
Pages: 4Language: englishTyp: PDF
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Authors:
Su, Jingxiang; Niekiel, Florian; Lofink, Fabian (Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstraße 1, 25524 Itzehoe, Germany)
Fichtner, Simon; Wagner, Bernhard (Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstraße 1, 25524 Itzehoe, Germany & Christian-Albrechts-Universität zu Kiel, Kaiserstraße 2, 24143 Kiel, Germany)
Kirchhof, Christine; Meyners, Dirk; Quandt, Eckhard (Christian-Albrechts-Universität zu Kiel, Kaiserstraße 2, 24143 Kiel, Germany)
Abstract:
In this paper, two highly sensitive MEMS magnetic field sensors based on magnetoelectric effect of piezoelectric-magnetostrictive composites have been investigated. High sensitivities of up to 424 V/T, low limit of detections of down to 128 pT/ Hz0.5 in resonance have been measured. High quality factors of more than 1600 for both sensors are achieved. The presented sensors display a frequency tuning effect with a frequency shift of up to 0.5 Hz/V, enabled by applying a DC voltage to their integrated piezoelectric actuators. The presented magnetic field sensors with adjustable resonance are of particular interest for vector field sensors or sensor arrays in bio-magnetic applications.