Piezoresistive Microcantilever for Gravimetric Particulate Matter Monitoring

Conference: MikroSystemTechnik 2019 - Kongress
10/28/2019 - 10/30/2019 at Berlin, Deutschland

Proceedings: MikroSystemTechnik Kongress 2019

Pages: 4Language: englishTyp: PDF

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Authors:
Bertke, Maik (TU Braunschweig, Institut für Halbleitertechnik (IHT), Hans-Sommer-Str. 66 and Laboratory of Emerging Nanometrology (LENA), Langer Kamp 6a/b, 38106 Braunschweig, Germany)
Xu, Jiushuai; Setiono, Andi; Peiner, Erwin (TU Braunschweig, Institut für Halbleitertechnik (IHT) & Laboratory of Emerging Nanometrology (LENA), 38106 Braunschweig, Germany)
Kirsch, Ina; Uhde, Erik (Fraunhofer Wilhelm-Klauditz-Institut für Holzforschung (WKI), Bienroder Weg 54E, 38108 Braunschweig, Germany)

Abstract:
A low-mass (nanogram) gravimetric direct-reading cantilever sensor is described for high-resolution portable airborne particulate matter detection and size classification. Owing to the small cantilever size, the piezoresistors for mass-induced sensing resonance-frequency shifts are connected to the cantilever as lateral struts. The cantilever is arranged over a microchannel through which particle-laden air is conducted. For size-selective deposition of charged particles on the cantilever an electrostatic field is applied between it and the microchannel wall. Realised sensors are tested against a standard particle sizer instrument in a chamber with carbon nanoparticles of mass concentrations of ≤10 myg/m3.