Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren

Conference: MikroSystemTechnik 2019 - Kongress
10/28/2019 - 10/30/2019 at Berlin, Deutschland

Proceedings: MikroSystemTechnik Kongress 2019

Pages: 4Language: englishTyp: PDF

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Authors:
Pfusterschmied, Georg; Weinmann, Christoph; Schneider, Michael; Schmid, Ulrich (Institut für Sensor- und Aktuatorsysteme, TU Wien, 1040 Wien, Austria)
Hospodka, Markus; Hofko, Bernhard (Institut für Verkehrswissenschaften, TU Wien, 1040 Wien, Austria)
Mirwald, Johannes (Institut für Chemische Technologien und Analytik, TU Wien, 1060 Wien, Austria)

Abstract:
In this conference proceeding, reusable micro-machined piezoelectric resonators are presented, which are capable to determine the viscosity values of super high viscous media with dynamic viscosities up to 64 000 mPa·s. To overcome the high viscous forces, the resonating element is designed such that the 10th order mode of a special vibration mode is excited, to provide sufficient output signal height even under such strong damping conditions. For actuation and sensing, a piezo-electric aluminium nitride (AlN) thin film is used in combination with a tailored electrode design. The comparison of three different bitumen derivatives are presented in a temperature range from 75 to 150 °C, demonstrating the high potential of the presented sensor concept for determining of super high viscous liquid properties in harsh environments.