Mikroozon - thermal flow sensors and ozone generating electrodes for water cleaning applications
Conference: MikroSystemTechnik 2019 - Kongress
10/28/2019 - 10/30/2019 at Berlin, Deutschland
Proceedings: MikroSystemTechnik Kongress 2019
Pages: 4Language: englishTyp: PDF
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Authors:
Knieling, Thomas; Laske, Norman; Rasmusssen, Mats; Samson, Jule; Muehler, Tobias (Fraunhofer-Institut für Siliziumtechnologie ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany)
Behrendt-Fryda, Barbara (Condias GmbH, Fraunhoferstr. 1b, 25524 Itzehoe, Germany)
Blohm, Lars; Nebling, Eric (Campton Diagnostics GmbH, Fraunhoferstr. 3, 25524 Itzehoe, Germany)
Abstract:
The public funded project “Mikroozon” aims at developing a small device to generate ozone-rich water for sanitizing purposes, e.g. in household applications. In order to build an affordable system, innovative diamond-coated electrodes are combined with a low-cost multi-sensor chip. The sensor measures the upstream water flow quality and the electronic signals are led to an open-loop control circuit which controls the electrodes activity. Sensors and electrodes are fabricated using thin-film and micro-machining processes.