Audio-Transducer for In-Ear-Applications based on CMOS-compatible electrostatic actuators
Conference: MikroSystemTechnik 2019 - Kongress
10/28/2019 - 10/30/2019 at Berlin, Deutschland
Proceedings: MikroSystemTechnik Kongress 2019
Pages: 4Language: englishTyp: PDF
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Authors:
Spitz, Barbara; Wall, Franziska; Schenk, Hermann; Melnikov, Anton; Ehrig, Lutz; Langa, Sergiu; Stolz, Michael; Kaiser, Bert; Conrad, Holger (Fraunhofer Institute for Photonic Microsystems IPMS, Maria-Reiche-Str. 2, 01109 Dresden. Germany)
Schenk, Harald (Fraunhofer Institute for Photonic Microsystems IPMS, Maria-Reiche-Str. 2, 01109 Dresden, Germany & Brandenburg University of Technology Cottbus-Senftenberg, Chair of Micro and nano systems, 03046 Cottbus, Germany)
Abstract:
Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity.